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FLOW Meters and Controllers |
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PORTER Mass Flow products reflect over three decades of experience in the design and manufacture of precision instruments for the measurement and control of gas flow. They incorporate design principles that are simple and straightforward, yet flexible enough to operate under a wide variety of process parameters.
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PORTER Mass Flow Controllers feature less than 2-second response time, and are available in numerous configurations and flow rates to satisfy a variety of demanding flow control applications.
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PORTER Mass Flowmeters, working on the same operating principles as the PORTER Mass Flow Controllers, are available in any flow range between 0-5 SCCM and 0-1000 SLPM N2.
PORTER Mass Flow Control Valves are normally closed, proportional control valves, handling0-5 SCCM to 0-5000 SLPM N2 flow rates. When coupled with a PORTER Mass Flowmeter, a closed loop control system is achieved which permits separate component (flowmeter and control valve) configurtion.
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Fast, precise control of low liquid flow in a compact (2.6" x 5.2") package
Clean room assembly. All metal seal construction for high purity and leak integrity.
Exclusive control circuitry combined with a piezo-electric-actuated control valve provides fast (2-second response time) and stable control at low flow rates. A unique thermal measurement system yields accurate measurement with less than a 5°C increase in fluid temperature. Full scale accuracy, including linearity, is +/- 1%.
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Fast, precise control of liquid precursors in semiconductor manufacturing processes.
Less than 1 second response time. Digital control circuitry and a piezo-electric-actuated control valve help contribute to this quick response. In addition, a unique laminar bypass and sensor assembly provide +/-1% of reading accuracy with only a 5°C rise in fluid temperature. All metal seal construction and clean room assembly assure high purity and leak integrity. Compact size (2.60"x 5.20") simplifies system integration.
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